Low-noise smart sensor based on silicon nanowire for MEMS resistive microphone

jamel nebhen, E. Savary, W. Rahajandraibe, C. Dufaza, S. Meillere, E. Kussener, H. Barthelemy, J. Czarny, A. Walther

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations


The design of CMOS integrated circuits dedicated to hybrid integration of a MEMS resistive microphone with readout interface is presented. Audio sensing is achieved with an innovative low-cost technology that implements piezoresistive detection in MEMS devices with single crystal silicon nanowires. The complete circuit includes a custom designed analog front-end consisting of a sensor conditioning and a fourth order single bit continuous-time sigma-delta modulator (CT-ΣΔM). The complete interface circuit exhibits a current consumption of 2mA. The obtained smart-sensor features a reduced output data rate that is suitable for a wireless sensor network with direct transmission of the raw data to a remote base station.

Original languageEnglish
Title of host publicationIEEE SENSORS 2013 - Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781467346405
StatePublished - 2013
Externally publishedYes
Event12th IEEE SENSORS 2013 Conference - Baltimore, MD, United States
Duration: 4 Nov 20136 Nov 2013

Publication series

NameProceedings of IEEE Sensors


Conference12th IEEE SENSORS 2013 Conference
Country/TerritoryUnited States
CityBaltimore, MD


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