Fabrication of Spin Coating Deposited Nanofilms Lead Titanate for MFM Capacitor

Z. Nurbaya, N. E.A. Azhar, L. N. Ismail, M. H. Wahid, Salman A.H. Alrokayan, Haseeb A. Khan, M. Rusop

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The use of high dielectric material for thin films capacitor has been known since the first ferroelectric materials were introduced. The capability to store large energy density would be the ideal criteria to pursue nanoscaled films capacitor applications. Nowadays, capacitor device becomes complex device rather than just focus at single function where ferroelectric material get involves. In this study, lead based titanate thin films ceramic will be fabricated by sol-gel spin coating method with typical multicoating layers to investigate the ferroelectric, dielectric properties, and capacitance characteristic. The measurements were based on 100 kHz and 1 MHz frequencies application which there's lies the significant finding of the dielectric materials property. Other, like surface profiler (KLA Tencor) is used as films thickness measurement that reports under 200nm thickness. PbTiO3 metal-ferroelectric-metal device is going to be prepared by involves the indium tin oxide coated glass as substrate, whereas Al metal will be deposited as top electrode through thermal evaporator method.

Original languageEnglish
Title of host publication2014 2nd International Conference on Electrical, Electronics and System Engineering, ICEESE 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages15-18
Number of pages4
ISBN (Electronic)9781479972012
DOIs
StatePublished - 2014
Externally publishedYes
Event2014 2nd International Conference on Electrical, Electronics and System Engineering, ICEESE 2014 - Kuala Lumpur, Malaysia
Duration: 9 Dec 201410 Dec 2014

Publication series

Name2014 2nd International Conference on Electrical, Electronics and System Engineering, ICEESE 2014

Conference

Conference2014 2nd International Conference on Electrical, Electronics and System Engineering, ICEESE 2014
Country/TerritoryMalaysia
CityKuala Lumpur
Period9/12/1410/12/14

Keywords

  • capacitance characteristic
  • dielectric properties
  • ferroelectric behaviour
  • Lead titanate thin films
  • MFM capacitor

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